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The study of chemical functionalization on tantalum oxide surface utilized for ISFET pH sensor in biomedical field

文献类型： 会议论文

第一作者： Chattarika Khamhanglit

作者： Chattarika Khamhanglit 1 ; Miyuki Tabata 1 ; Yuji Miyahara 1 ;

作者机构： 1.Institute of Biomaterials and Bioengineering, Tokyo Medical and Dental University

关键词： ISFET pH sensor;Chemical immobilization;Tantalum oxide

会议名称： センサ・マイクロマシンと応用システム シンポジウム

主办单位：

页码： 195-197

摘要： The ion-sensitive field-effect transistor (ISFET), a pH-sensitive biosensor, is the first miniaturized silicon-based sensor (1). The gate used for this biosensor consists of Ta_2O_5 insulator layer. In this metal oxide layer, there is an active surface with hydroxyl groups, which can detect the proton in an analyte solution. On the other hand, biomolecule immobilization process on the ISFET gate is necessary to detect proton consumption and production during biochemical reaction. This principle device theory was called "So-called site-binding theory (2)". Therefore, it is important to determine the relationship between the number of immobilized compound and electrical properties of ISFET. In order to apply the ISFET pH sensing in biomedical term for biomolecule detection, the gate modification concept is important and considered. The purpose of our work is to study the pH sensitivity affected by gate modification of ISFET pH sensor. Two compounds (i.e. 3-aminopropyl trietroxylsilane and 10-carboxyldecyl phosphonic acid reacted oleylamine) were considered for this surface functionalization in order to present the different functional groups on the surface, which is essential for the protein marker binding in the biosensor research.

分类号： TP212-53

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[1]Comparison of cell adhesion properties using different binding materials for cell-based bio-transistors applications. Xinyue Liu,Miyuki Tabata,Yuji Miyahara. 2020

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