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Electro-spraying and ultra-violet light curing of polydimethylsiloxane to fabricate thin films for low-voltage dielectric elastomer actuators

文献类型： 会议论文

第一作者： Florian M. Weiss

作者： Florian M. Weiss 1 ; Gabor Kovacs 1 ; Tino T?pper 2 ; Bekim Osmani 2 ; Vanessa Y. F. Leung 2 ; Bert Müller 2 ;

作者机构： 1.Swiss Federal Laboratories for Materials Science and Technology, überlandstrasse 129, 8600 Dübendorf, Switzerland

2.Biomaterials Science Center, Department of Biomedical Engineering, Medical Faculty, University of Basel, 4123 Allschwil, Switzerland.

关键词： Ellipsometry;nanometer-thin film;atomic force microscopy;surface roughness;artificial muscle;incontinence

会议名称： SPIE Conference on Electroactive polymer actuators and devices

主办单位：

页码： 97983C-1-97983C-9

摘要： Currently, dielectric elastomer actuators (DEA) are mainly based on micrometer-thin polymer films and require operating voltages of several hundred volts. In medical applications, however, voltages as low as a few tens of volts are required. To this end, we prepared nanometer-thin dielectric elastomer layers. It is demonstrated that alternating current, electro-spray deposition allows for the fabrication of homogenous, flat, nanometer-thin polydimethylsiloxane (PDMS) films. The growth of the PDMS with average number molecular weights ranging from 800 to 62,700 g/mol, at a constant flow rate of 267 nL/s, was in situ monitored by means of spectroscopic ellipsometry. The Cauchy layer model used for data interpretation may only be applied to flat PDMS layers. Thus, in the present study the droplet morphology was also determined by atomic force microscopy. Spectroscopic ellipsometry does allow for the qualitative determination of the thin film morphology. However, for high molecular weight polymers the precise measurement during deposition is challenging. Independent of the molecular weight, the roughness of the deposited PDMS films considerably smoothens during the ultra-violet radiation treatment. After curing, the electro-sprayed nanometer-thin PDMS films are homogeneous enough to qualify for the fabrication of low-voltage DEA.

分类号： n-532

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